Varian Sells First Genus-Developed High-Energy Implanter

N/ASemiconductor has ordered two Kestrel 650 high-energy implanters from Varian Assoc. (Palo Alto, CA). This order marks Varian's first sale of the Kestrel system since the company acquired the MeV implant operation of Genus in August 1998. The acquisition enabled Varian to enter the MeV market earlier than planned, and to offer the full energy range—from 250 eV to 3.75 MeV—across its line of implanter products.

The first Kestrel system will be shipped in December to TECH Semiconductor DRAM fabs in Singapore. The second system is scheduled to be shipped in the second quarter of 1999. TECH Semiconductor currently operates a number of Varian medium current implanters. They plan to use the Kestrel 650 to run advanced 64M DRAMS.

The Kestrel 650 and 750 systems enable manufacturers to achieve high MeV yields and broad energy ranges with low operating costs. Kestrel instruments have simple system approaches, expanded energy ranges to cover the growing market requirements, and small footprints for optimal facility flexibility.

Varian Assoc. is a $1.4 billion, diversified, high-technology company with core businesses in semiconductor manufacturing equipment, analytical instruments, and health care systems that provide products and services to worldwide markets. It operates manufacturing facilities in North America, Europe, Asia, and Australia and has sales and service offices worldwide.

For more information, call 978-282-2298.

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