Surface Profiler Product Line

A surface profiler product line, an advanced stylus-based metrology system, measures step heights, roughness, and planarity in a range of R & D applications. The enhanced DEKTAK 3 Series has step height repeatability of 10 angstroms, one sigma, and enables profiling of surface features for microelectronic applications such as semiconductor wafers, micromachined devices (MEMS), hybrid circuits, surface mount devices, electrical contacts as well as the thickness of thin films, paints and coatings.

The profiler is also used to measure roughness and topography on substrates, polymers, optical lenses, metallurgy and advanced materials. The profiler includes a Pentium computer for computation of measurement data and analytical parameters such as Ra, Rt, Rq, TIR and average step height. The profiler operates on Microsoft Windows 98 graphical user interface. Three models are available: the DEKTAK 3, DEKTAK 3ST, and DEKTAK 3ST AUTO I. The contact scan method offers stylus forces down to one milligram force and all scans are referenced to an optical flat. A variety of analytical functions are available for measuring surface parameters such as Ra, Wa, Peak-to-Valley and slope. A multi-scan summary feature provides comparative analysis of the analytical results from multi-scan operations.

The DEKTAK Surface Profiler product line celebrates the 30th anniversary of its production this year.

For more information, contact:

Digital Instruments, Veeco Metrology Group, 112 Robin Hill Road, Santa Barbara, CA 93117

Fax: 805-967-7717