Surface Mount Components
Source: Millipore Corporation, Microelectronics Gas Process Division
The family of Slim Line gas delivery components for 1-1/8 inch surface mount technology is now available
The family of Slim Line gas delivery components for 1-1/8 inch surface mount technology is now available. The performance and small footprint design enable tool manufacturers to meet challenging gas delivery requirement associated with sub-.08mm processing of 300mm wafers.
Designed for smaller on-tool panels, the compact IntelliFlow Digital MFC provides digital flow control for RF noise immunity, embedded diagnostics to increase uptime, multi-gas calibration for part number reduction and best in class repeatability for uniform wafer processing.
Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000; Fax: 972-359-4100.
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