Product/Service

Substrate Heaters

Source: AJA International
Substrate Heaters
The AJA International SHQ400-X Substrate Heaters deliver up to 2000 watts of radiant heat to either a fixed or rotating substrate holder

The AJA International SHQ400-X Substrate Heaters deliver up to 2000 watts of radiant heat to either a fixed or rotating substrate holder, allowing substrates to reach temperatures of up 10 850°C (rotating) /950°C (fixed). Models are available for three-in. and four-in. diameter substrates although either can be used to heat a number of smaller substrates.

Each unit includes two UHV-compatible quartz halogen lamps, a water-cooled reflector box, dual "K type" thermocouples (substrate holder, overtemperature protection), dual ceramic power connectors for lamps, dual vacuum feedthroughs (TC's, lamp power) and vacuum compatible wiring and tubing. Both HV and UHV versions are available. DC and/or RF biasing of the substrate is an option for both fixed and rotating models.

AJA International, P.O. Box 246, 809 Country Way, North Scituate, MA 02060. Tel: 781-545-7365; Fax: 781-545-4105.

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