Scanning Capacitance Microscopy
Source: ThermoMicroscopes
Scanning Capacitance Microscopy (SCM)is a variation of Electrostatic Force Microscopy (EFM)that produces sub-surface capacitance measurements
Scanning Capacitance Microscopy (SCM)is a variation of Electrostatic Force Microscopy (EFM)that produces sub-surface capacitance measurements. SCM induces a voltage between the tip and the sample. The cantilever operates in a non-contact, constant-height mode.
A circuit monitors the capacitance between the tip and the sample. Since the capacitance depends on the dielectric constant of the medium between the tip and the sample. SCM studies can image variations in thickness of a dielectric material on a semiconductor substrate. SCM can also be used to visualize sub-surface charge-carrier distributions.
ThermoMicroscopes, 1171 Borregas Ave., Sunnyvale, CA 94089. Tel: 408-747-1600; Fax: 408-747-1601.
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