Residual Gas Analyzer

The QualiTorr Orion Compact Residual Gas Analysis System features a small footprint for base pressure RGA, leak detecting, and high vacuum process monitoring.

The product is used in single-chamber tools as well as on cluster tools, providing continuous monitoring in loadlock chambers and base pressure testing of process chambers. It can also handle process monitoring in evaporation, molecular beam epitaxy, and ion implant as well as other HV processing applications. The system has a complete electronic control unit on the sensor head with a direct connection to the host computer and runs on Orion RGA and process monitoring software.

The system consists of an open ion source quadrupole mass spectrometer sensor, a yttrium oxide-coated iridium filament assembly, ¼-in. stainless steel rod set, a dual Faraday/electron multiplier detector, and an electronics control module. It can be configured with a vacuum housing (2.75-in. CF flange interface), heater jacket, and vacuum isolation valve. It is powered by an external 24-volt supply and interfaces with the host computer through an RS-422 communications port.

MKS Instruments, Six Shattuck Rd., Andover, MA 01810-2449. Tel: 800-227-8766 or 978-975-2350; Fax: 978-975-0093.