Product/Service

Prisma: Quadruple Mass Spectometer Gas Analyzers

Source: Pfeiffer Vacuum, Inc.
Cost-effective solution for process monitoring
Cost-effective solution for process monitoring

    Compact design... offering unrivaled sensitivity and detection limit

    Powerful Quadstar software... Windows based for simple operation with dynamic data exchange

Advantages:

  • Available in 100, 200 and 300 amu mass ranges
  • High pressure capabilities
  • Bakeout up to 300°C (UHV Applications)
  • Available with a space saving 90° connector
  • Powerful, low cost tool for R&D applications
  • Enhances diagnostics, verification and control of semiconductor fabrication processes
  • Provides early detection of potential vacuum system problems, such as vacuum leaks, contamination, trace gases present, etc.
  • Improves product yield and reduces or eliminates unscheduled downtime.

Features:

  • Economical
  • Compact - easily integrates into existing vacuum tools
  • Unrivaled sensitivity and detection limit
  • Spectra library aides identification of gases
  • Software configured - time savings and reduced possibility of error
  • Two filaments - doubles uptime, reduces routine maintenance
  • Two analog input and four output signals
  • High dynamic range

FEATURE   BENEFIT
QuadstarTM software under Windows Greater reliability, all relevant data are stored
Special RGA user interface Simplifies the spectrometer operation
Autoranging Electrometer amplifier always in the proper range
Detection limit in ppb range Suitable for trace analysis
High Dynamic Range Very high concentration differences can be measured
Fast LAN interface with fiber optic Fast transmission of large amounts of data
64 measurement channels Programmable measurement parameters for 64 mass numbers/ion currents
Two output relays that are freely combinable with the switching thresholds or direct control by the software Safety cut-out when an ion current threshold is violated
High mass scale stability Less calibration work
Fast electrometer amplifier, high zero stability, automatic offset alignment Fewer measurement errors

Applications

This powerful low cost tool is useful for R&D applications including high energy physics and general purpose gas analysis. The Prisma gas analyzer employs powerful Windows based Quadstar software offering simple, push button, preprogrammed operations that provide detailed in situ gas analysis of your vacuum system. By connecting the Prisma gas analyzer to a single PC, it can be used as a stand-alone tool or a number of units can be multiplexed with high-speed LAN fiber optic communications.

  • Leak Detection
  • Linear Accelerator
    High voltage environment, fiber optic cable enables electronically isolated communication between mass spec and control room
  • Geology
    Analyze gases in core samples
  • Test Materials for Military Applications
    Analyze what outgases at certain temperatures/pressures
  • Optical Coating Labs
    Verify that the lens and system are clean
  • Wafer Transfer Module
    Monitor wafers for surface desorbed chemicals and general contamination before going into process chamber
  • Add on to a UHV system
    Thermal program desorption
  • R&D
    High energy physics and general gas analysis
  • Transmission Electron Microscope
    Monitor water vapor

Specifications

 PRISMA  QMS 200 F1  QMS 200 M1
Mass Range, amu  1 - 100  1 - 100 
Detector  Faraday  Channletron/Faraday 
Detection Limit, mbar  1 x 10-12  <10-14 / <5 x 10-12 
Sensitivity for Ar, A/mbar  >1 x 10-3  >200 />5 x 10-4 
Contribution to Neighboring
Mass 40 / 41, ppm 		 <50  <50 /<50 
Weight, kg  3  4.4 

 PRISMA  QMS 200 F2  QMS 200 M2
Mass Range, amu  1 - 200  1 - 200 
Detector  Faraday  Channletron/Faraday 
Detection Limit, mbar  <2 x 10-12  <10-14 /<10-11
Sensitivity for Ar, A/mbar  >6 x 10-4  >200 />3x 10-4 
Contribution to Neighboring
Mass 40 / 41, ppm 		 <50  <50 /<50 
Weight, kg  3  4.4 

 PRISMA  QMS 200 F3  QMS 200 M3
Mass Range, amu  1 - 300  1 - 300 
Detector  Faraday  Channletron/Faraday 
Detection Limit, mbar  4 x 10-12  <2 x 10-14 / <2 x 10-11 
Sensitivity for Ar, A/mbar  >3 x 10-4  >100 />1.5 x 10-4 
Contribution to Neighboring
Mass 40 / 41, ppm 		 <50  <50 /<50 
Weight, kg  3  4.4