Product/Service

Photochemical Dispense System

Source: Millipore Corporation, Microelectronics Gas Process Division
The new IntelliGen 2 Photochemical Dispense System with IMPSCT LHVD Filter and Digital Valve Control for I-line and DUV wafer processes offers accurate and repeatable dispense of photochemicals on wafer
The new IntelliGen 2 Photochemical Dispense System with IMPSCT LHVD Filter and Digital Valve Control for I-line and DUV wafer processes offers accurate and repeatable dispense of photochemicals on wafer.

The system incorporates the manufacturer's patented two-stage dispense technology that allows for filtration and dispense at different rates, minimizing pressure changes to reduce microbubble defects and increase repeatability. The components of the system work together to reduce waste and wafer defects, and to increase uptime and availability. In addition, a "smart" feedback loop communicates with the track for greater efficiency and to help prevent errors.

For filtration, the system incorporates the IMPACT LHVD Filter with the manufacturer's proprietary connections. The filter is constructed of a proprietary membrane and features a molded exterior to reduce the possibility of leaks. According to the manufacturer, filter changeouts are fast and easy, with no tools and no chemical exposure.

Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000.