PFC Gas and Dielectric Fluid for Environmental and Performance Needs

Two new products have been developed to meet performance, environmental, and worker safety concerns. This company's Specialty Gas PFG-3840 is a perfluorocarbon (PFC) gas used for semiconductor chamber cleaning, and the Novec Engineered Fluid HFE-7500 is a dielectric fluid used in heat transfer applications.

According to the manufacturer, the PFG-3840 high performance chamber cleaning gas reduces global warning compound emissions by 90% when compared to the traditional plasma enhanced chemical vapor deposition (PECVD) cleaning gas, C2F6. This product can also help reduce operating costs by up to two-thirds with reduced gas consumption and with no additional capital expenditure. This gas has zero ozone-depletion potential and it is not defined or regulated by the U.S. Environmental Protection Agency as a volatile organic compound (VOC). In addition, the gas does not contribute to ground-level smog formation.

The HFE-7500 is used in thermal management applications and is a low global warming replacement for PFC and perfluoropolyether (PFPE) dielectric fluids. The manufacturer states that it has a global warming potential about 50% lower than comparable PFC and PFPEs. It helps reduce environmental impact of wafer fabrication facility (fab) process without sacrificing performance or reliability. The fluid's high dielectric strength reduces the risk of electrical discharge and will not damage the wafer or equipment in the event of a leak, and can be used for etcher, ion implanters, testers, and other fab equipment. The fluid is non-flammable, low in toxicity, and has zero ozone depletion potential. According to the manufacturer, this fluid was developed for long-term use, taking into account both current and pending environmental regulations.

3M Electronic Materials, 3M Center, Bldg. 223-6S-04, St. Paul, MN 55144-1000. Tel: 800-833-5045. Fax: 651-737-1764.