Orsay Physics Launches The Highest Resolution FIB In The World

Fuveau, France - Orsay Physics launched his new generation COBRA-FIB (focused ion beam) column.

In addition to its unsurpassed resolution guaranteed at 2.5nm, sub-2nm images have been performed with gallium at 1pA. (20/80% SE image on platinum sample)

High current modes have also been optimized providing an extremely well defined beam shape with unique milling performances.

This ORSAY-PHYSICS achievement is the result of 20 years of expertise and R&D in charged particle optics.

COBRA-FIB represents the top level technology in terms of resolution both for imaging and milling.

COBRA-FIB guarantees the shortest time-to-result for cross-sections and TEM sample preparations in FA processes, as well as circuit editing.

Besides this process time optimization, COBRA-FIB represents the sharpest nano-engineering FIB instrument.

COBRA-FIB is available for R&D laboratories as well as FIB equipment manufacturers, and is easily adaptable on many vacuum chambers.

A UHV version has been developed with identical beam performances.

SOURCE: Orsay Physics