Gas Regulators for Semiconductor Manufacturing

The new 700/710 Series of gas pressure regulators is designed for the ultra high-purity and low particulate requirements of processes in semiconductor wafer manufacturing. The series is assembled, cleaned, and packaged in the manufacturer's Class 100 Cleanroom environment, and is said to offer good reliability and precision pressure control without contributing to particulate contamination.

Series 700 is designed for ultra high-purity inert or low-hazard gases such as halocarbons, carrier, and cylinder purge gases. Series 710 is built with an enhanced tied diaphragm design and uses a poppet directly connected to the diaphragm to ensure positive shutoff. This tied diaphragm is a feature required for handling process gases, making the regulator well suited for use in semiconductor wafer fabrication gas distribution systems and panels.

The gas regulators each feature an on-site adjustable pressure limit, a sealed bonnet to prevent gas leakage in case of diaphragm failure, metal to metal diaphragm seals for high-leak integrity, and lateral flow passages for complete internal purge. In addition, a metal to metal seal and isolated thread design can prevent particle entrapment.

Construction materials include 316L VAR stainless steel with internal surfaces electropolished/finished to 10 Ra microinch. Operating pressure is 3,500 psig (241 BAR), temperature range is -40°F to 160°F, and C_v equals 0.06. Helium leak testing (1 ×10^-9scc/sec) is standard.

Concoa, 1501 Harpers Rd, Virginia Beach, VA 23454. Tel: 800-225-0473. Fax: 757-422-3125.