Electron Microscope

The LEO 1560 electron microscope combines a large cylindrical chamber capable of handling up to 8-in. wafers with the GEMINI column, designed for high probe current and beam stability over a wide voltage range. The product features an integrated 8-in. airlock and a fully motorized 6-axis stage.

Simultaneous high resolution imaging (SE and BSD) and X-ray analysis is possible due to the working distance of 8.5 mm.

The Windows control system offers a range of image archiving, networking and hardcopy solutions. User access profiles can be set up by the system supervisor using the built-in Administrator utility. Wafer navigation software, utilizing KLA or Tencor data for defect review is optionally available. The oil-free pumping system an optional stainless steel table tops allow installation even in high class cleanrooms.

LEO Electron Microscopy Ltd., Clifton Rd., Cambridge CB1 3QH. Tel: 44-1223-414166; Fax: 44-1223-412776.