Product/Service

Digital Mass Flow Controller

Source: Millipore Corporation, Microelectronics Gas Process Division
The Intelliflow T is a new pure digital mass flow controller designed for applications where customers need two different ranges for the same gas or two different process recipes on the same chamber
The Intelliflow T is a new pure digital mass flow controller designed for applications where customers need two different ranges for the same gas or two different process recipes on the same chamber. This can eliminate the need for multiple gas lines to accommodate high and low flows of the same gas, increasing gas panel flexibility.

Features of the controller include:

  • Uniform settling times on all gases, reducing process sequence time ad improving system throughput.
  • Embedded Diagnostics software, which allows user to check MFC functionality without removing the controllers DFC from the process tool, helping reduce downtime.
  • Small physical size and weight, which can reduce gas panel footprint and overall cost of construction.

The controller is well suited for use with reduced footprint 300 mm process tools and features a graphical user interface that allows for real-time process monitoring to reduce machine downtime and costs.

In addition, the controller's DFC uses a state-of-the-art digital signal processor (DSP) with "No Mechanical Pots" to adjust for sensor flow rate measurement, valve drive control, and signal processing. The DFB is fully compatible with conventional RS485 and DeviceNet Protocols, CE Mark, and UL-991 certification requirements.

Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000.