Compact Gages
Two Gauges in One!
Pfeiffer Vacuum offers a dual gauge that's right for your application -
- Bayard Alpert and Pirani gauges combined
- Cold Cathode and Pirani gauges combined
- Hot Cathode Ionization and Pirani gauges combined
By integrating two gauges in one compact design the benefits are:
- One port, one gauge for reduced costs
- Integrated electronics
- Linear output across entire vacuum range
- Output voltage that is easily converted to any pressure measurement unit
The FullRange BA (Bayard-Alpert Pirani gauge) measures from 5 x10-'° mbar to atmosphere. This gauge has excellent repeatability of +/- 5% with +/- 15 % accuracy and is available with 25 ISO-KF, 40 ISO-KF and 40 CF flanges. It is ideal for base pressure monitoring and general vacuum measurement
Other advantages:
- Degas feature to sputter away contaminants
- Easy to replace sensor
- Selectable switching threshold between Pirani and Hot lon sensor avoiding contamination
- Automatic HV adjustment for the Pirani with Hot lon eliminates the need for Pirani adjustment due to contamination or aging
Cold Cathode/Pirani Gauge:
The FullRange CC (Cold cathode/Pirani gauge) combines these two gauges to read from atmosphere to UHV in one gauge. Complete with integrated electronics for a compact design.
- One port, one gauge for reduced costs
- Newly designed electronics dramatically reduces cleaning intervals for extended uptime
- Integrated electronics
- Linear output across entire vacuum range
- Output voltage that is easily converted to any pressure measurement unit
Hot Cathode Ionization/ Pirani Gauge:
The Process Ion Gauge (Hot Cathode Ionization/Pirani gauge) measures vacuum from atmosphere to 10-6 mbar. The built-in automatic switchover virtually eliminates filament burnout so you can get better accuracy and stability in your thin film processes.
Advantages:
- Highest stability, accuracy and reproducibility
- Auto-degas protects gauge from contamination
Pfeiffer Vacuum, Inc., 24 Trafalgar Square, Nashua, NH 03063. Tel: 603-578-6500; Fax: 603-578-6550.