Closed Ion Source Gas Analyzers

The CIS series closed ion gas analyzers offer 1 ppm detection limit for all gases and direct sampling at mTorr pressure. A real-time Windows software package is provided for on-line process monitoring and control, gas purity verification, residual gas analysis and leak checking applications.

The analyzers also have a mass range up to 300 amu, complete programmability and multiple head operation.

Stanford Research Systems, 1290D Reamwood Ave., Sunnyvale, CA 94089. Tel: 408-744-9040; Fax: 408-744-9049.