Spectroscopic Ellipsometer
Source: J.A. Woollam Co.
The VASE is a variable angle spectroscopic ellipsometer with a
The VASE is a variable angle spectroscopic ellipsometer with a horizontal sample mount. This mounted sample stage permits safe, rapid loading and unloading of large samples, including semi-conductor wafers, computer discs and flat panel displays. It has the potential for robotic sample handling, and X-Y or R-O translation by stepper motor with surface parameter mapping, which is also possible. It is fully automated under computer control, and it can be applied to semiconductor wafers, magnetic and magneto-optic computer discs, flat panel display materials, and large area optical coatings.
J.A. Woollam Co., 645 M St., Suite 102 Lincoln, NE 68508 Phone: (402) 477-7501 Fax: (402) 477-8214
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