Product/Service

One-micron Filtration

Source: Millipore Corporation, Microelectronics Gas Process Division
Intended for point-of-use filtration of Chemical Mechanical Planarization (CMP) slurries, the Solaris SLR01 Filter is specifically designed to help reduce wafer defects wile offering optimal filter change out frequency and ease of use
Intended for point-of-use filtration of Chemical Mechanical Planarization (CMP) slurries, the Solaris SLR01 Filter is specifically designed to help reduce wafer defects wile offering optimal filter change out frequency and ease of use.

The device is a one-micron rated filter constructed of all polypropulene and is specifically engineered for point-of-use filtration of copper, oxide, and metal slurries. Its disposable design can minimize exposure to the slurry and, according to the manufacturer, is simple and convenient to change out.

Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000.