MOVPE Reactor
Source: AIXTRON Inc.
This reactor is useful for small scale production and research and
This reactor is useful for small scale production and research and development. It has a wafer capacity of 1 x 2 inches, and it has an average throughput of up to 1,000 wafers per year. Capable of handling III-nitrides and III-v compounds, this reactor has optimal homogeneity in film thickness and composition. The processes are easily transferable to and from other reactors, while providing excellent electrical and optical film quality. It also has a high temperature reactor, 1,100º for nitride applications.
Aixtron, Inc., 1569 Barclay Blvd., Buffalo Grove, IL 60089 Phone: (847) 215-7335 Fax: (847) 215-7341
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