Laser Crystallization System
Source: Jemi France
This single area excimer crystallation system (SAELC) consists of large excimer lasers combined with
This single area excimer crystallation system (SAELC) consists of large excimer lasers combined with spectroscopic ellipsometry instrumentation for real time in-line control. The purpose of these machines is to convert a thin amorphous silicon layer into polycrystalline silicon at low temperature with a homogenized beam covering a large area. It also provides high quality poly-TFT on low-cost glass substrates. The high energy emitted by the laser covers full display surfaces with a single shot, preventing any overlapping side effect.
Jemi France, 18 Avenue Du Quebec, B.P. 721 Ls Ulis Ceex 91962 France Phone: 33 1 69 28 08 86 Fax: 33 1 69 28 08 70
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