The system is fully automatic in operation with loading/unloading of substrate carriers – the only operator task required. The control system is based on a PC and PLC platform with graphic screens on the computer indicating system status and process variables. Multiple process "recipes", once developed, are stored and run as dictated by production needs. Manual and semi-automatic modes are included for initial process development and optimization as well as troubleshooting or maintenance.
Additional features of the system include load lock protection for the process chambers, downstream pressure control, gas control, substrate rotation, heating and cooling of chamber and/or substrates, 6-inch viewports and auxiliary ports for RGA, thickness monitoring, temperature measurement or other requirements. Retrofit option for additional chambers are available.
<%=company%>, 70 Industrial Park Road, Plymouth, Massachuetts 02360; Phone: 508-732-7200 ex 15; Fax: 508-732-0317