Our Gas Humidifier delivers saturated gas at a fixed temperature in the manufacturing of Semiconductor Wafers
Our Gas Humidifier delivers saturated gas at a fixed temperature in the manufacturing of Semiconductor Wafers. Cal-Glass for Research, Inc. has recently introduced a device to aid in the efficiency of delivering saturated air to the semiconductor fabrication process. Our process wets the gas prior to entering the furnace environment instead of actually mixing with the gas in the furnace. The Cal-Glass Gas Humidifier may make your the wet oxidation method more efficient for your specific process.
The Cal-Glass Gas Humidifier is designed to maintain a fixed level of de ionized water through which gas is bubbled. The water is temperature controlled at just under boiling to produce maximum saturation without producing steam. The unit is designed to ensure that entertainment is prevented and to only allow gas to proceed out of the humidifier to its specific destination.
The gas humidifier is enclosed within a steel cabinet. The control system mounts onto the cabinet and is designed to maintain the liquid level and regulate temperature of the liquid. The temperature is controlled by a PID algorithm to assure minimal overshoot and stabilized control. The unit also incorporates controls to insure safety in regards to overheating and overfilling of the system.
The heart of Cal-Glass for Research's Gas Humidifier is a custom made Pyrex distillation apparatus. Each one is made to exacting standards in our glass shop.
Cal-Glass for Research, Inc., 3102 Enterprise St., Costa Mesa, CA 92626. Tel: 714-546-7250; Fax: 714-755-7800.