Product/Service

Gas Filters Available in Bronze, Silver, and Gold

Source: Millipore Corporation, Microelectronics Gas Process Division
This company's Wafergard Family of MAX Teflon Gas Filters is available in a bronze, silver, or gold offering
This company's Wafergard Family of MAX Teflon Gas Filters is available in a bronze, silver, or gold offering. The family of filters is used in ozone and low vapor pressure gases where a compact configuration, low-pressure drop, and a high-surface-area membrane design are required. They are also used for high flow inert gases, typically 500-800 SLPM.

Applications for the filter materials listed above are as follows:

  • Bronze – for general inert gases.
  • Silver – for pure inert gases
  • Gold – for fine processes that meet certain SEMI specifications. This filter carries a five-year warranty.

Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000.