Gas Filters Available in Bronze, Silver, and Gold
Source: Millipore Corporation, Microelectronics Gas Process Division
This company's Wafergard Family of MAX Teflon Gas Filters is available in a bronze, silver, or gold offering
This company's Wafergard Family of MAX Teflon Gas Filters is available in a bronze, silver, or gold offering. The family of filters is used in ozone and low vapor pressure gases where a compact configuration, low-pressure drop, and a high-surface-area membrane design are required. They are also used for high flow inert gases, typically 500-800 SLPM.
Applications for the filter materials listed above are as follows:
- Bronze – for general inert gases.
- Silver – for pure inert gases
- Gold – for fine processes that meet certain SEMI specifications. This filter carries a five-year warranty.
Millipore Corporation, Microelectronics Gas Process Division, 915 Enterprise Boulevard, Allen, TX 75013. Tel: 972-359-4000.
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