Turbomolecular Pump
Source: Varian, Inc.
The ICE (Implantation, Coating, Etching) 1000-E turbomolecular pump is designed for improved reliability in semiconductor fabrication and other ultra-clean manufacturing environments
The ICE (Implantation, Coating, Etching) 1000-E turbomolecular pump is designed for improved reliability in semiconductor fabrication and other ultra-clean manufacturing environments. It features a dust centrifugator that facilitates particulate evacuation to increase pump life and a compact, lightweight design. This model is the newest in a family of turbomolecular pumps ranging from 300 to 2000 liters/second (l/s) capacity.
Varian, Inc., 121 Hartwell Avenue, Lexington, MA 02421. Tel: 781-861-7200; Fax: 781-860-5437.
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