Preventive Maintenance Device for Anticipating Pump Failures
Source: Varian Associates Inc., Vacuum Products Div.
MoniTorr is a preventive maintenance device for analyzing turbomolecular pump operations
MoniTorr is a preventive maintenance device for analyzing turbomolecular pump operations. The tool monitors systems performance, anticipates turbopump failure, and can maximize uptime in industries such as semiconductor manufacturing.
The tool is an optional component of the manufacturer's remote assist service program for turbomolecular pumps, which includes PC software and 36-month, customized technical support assistance. The tool uses built-in memory to store typical operation parameters such as vibration spectra. Stored data is periodically to the manufacturer's technical support center, where it is archived and analyzed.
Using the manufacturer's Statistical Pump Control (SPC) process, archived data is compared against current pump behavior to determine if preventive trubopump replacement is necessary.
Varian Associates Inc., Vacuum Products Div., 121 Hartwell Avenue, MA 02421. Tel: 800-VARIAN. Fax: 781-860-5405
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