Integrated Flow Controller for Liquid Chemicals
Source: NT International
The new Model 6500 Integrated Flow Controller is designed to accurately control the flow rates of high purity liquid chemicals, enabling users to gain control of process parameters for dispensing applications
The new Model 6500 Integrated Flow Controller is designed to accurately control the flow rates of high purity liquid chemicals, enabling users to gain control of process parameters for dispensing applications. The controller is compatible with highly corrosive chemicals and is designed for use in CMP slurry applications.
Using all PTFE wetted parts, the controller utilizes a double diaphragm valve coupled with the manufacturer's differential pressure flowmeter. It performs closed-loop flow control to deliver the exact liquid flow rate requested by the user. This product can control liquid flow from 25 mLpm to 10 Lpm using an analog set-point signal from a user's process tool.
NT International, 5155 East River Road, Minneapolis, MN 55421. Tel: 763-502-0200. Fax: 763-502-0300.
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